Patent · US Active

Auto-sequencing inline processing apparatus

US8672603B2 · kind B2 · utility

4Cited by

25References

20Claims

0Family size

Assignee

ORBOTECH LT SOLAR, LLC. · US

Inventors

Wendell T. Blonigan · Union City, US
Masato Toshima · Sunnyvale, US
Kam S. Law · San Jose, US
David E. Berkstresser · San Jose, US
Steve Kleinke · San Jose, US
Craig L. Stevens · Rochester, US

Key dates

Filing date	Dec 10, 2010
Grant date	Mar 18, 2014
Priority date	—
Expiry date	Jul 26, 2031

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49948
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.