Patent · US Active

Field effect transistor and schottky diode structures

US8680611B2 · kind B2 · utility

7Cited by
363References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 30, 2012
Grant dateMar 25, 2014
Priority date
Expiry dateAug 30, 2032

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/516
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

In accordance with an embodiment a structure can include a monolithically integrated trench field-effect transistor (FET) and Schottky diode. The structure can include a first gate trench extending into a semiconductor region, a second gate trench extending into the semiconductor region, and a source region flanking a side of the first gate trench. The source region can have a substantially triangular shape, and a contact opening extending into the semiconductor region between the first gate trench and the second gate trench. The structure can include a conductor layer disposed in the contact opening to electrically contact the source region along at least a portion of a slanted sidewall of the source region, and the semiconductor region along a bottom portion of the contact opening. The conductor layer can form a Schottky contact with the semiconductor region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.