Method and apparatus for decorrelation of spatially and temporally coherent light
US8693095B2 · kind B2 · utility
0Cited by
9References
20Claims
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Key dates
| Filing date | Jan 29, 2013 |
| Grant date | Apr 8, 2014 |
| Priority date | — |
| Expiry date | Jan 29, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/48
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus for decorrelating coherent light from a light source, such as a pulsed laser, in both time and space in an effort to provide intense and uniform illumination are provided. The techniques and apparatus described herein may be incorporated into any application where intense, uniform illumination is desired, such as pulsed laser annealing, welding, ablating, and wafer stepper illuminating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.