Patent · US Active

Capacitor top plate over source/drain to form a 1T memory device

US8716081B2 · kind B2 · utility

4Cited by
13References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 15, 2007
Grant dateMay 6, 2014
Priority date
Expiry dateMar 28, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B10/00

Abstract

A method and structure for a memory device, such as a 1T-SRAM, having a capacitor top plate directly over a doped bottom plate region. An example device comprises the following. An isolation film formed as to surround an active area on a substrate. A gate dielectric and gate electrode formed over a portion of the active area. A source element and a drain element in the substrate adjacent to the gate electrode. The drain element is comprised of a drain region and a bottom plate region. The drain region is between the bottom plate region and the gate structure. A capacitor dielectric and a capacitor top plate are over at least portions of the bottom plate region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.