Inventor · Singapore, SG

Johnny Widodo

21Patents
4h-index
58Co-inventors
58Inventor score

Filing activity: Feb 22, 2006 → Aug 2, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7524755B2 Entire encapsulation of Cu interconnects using self-aligned CuSiN film Electricity 26 Expired
US7566656B2 Method and apparatus for providing void structures Electricity 12 Active
US7847402B2 BEOL interconnect structures with improved resistance to stress Electricity 4 Active
US7838390B2 Methods of forming integrated circuit devices having ion-cured electrically insulating layers therein Electricity 4 Active
US8716081B2 Capacitor top plate over source/drain to form a 1T memory device Electricity 4 Active
US8178417B2 Method of forming shallow trench isolation structures for integrated circuits Electricity 4 Active
US8274115B2 Hybrid orientation substrate with stress layer Electricity 3 Active
US7687381B2 Method of forming electrical interconnects within insulating layers that form consecutive sidewalls including forming a reaction layer on the inner sidewall Electricity 3 Active
US8053327B2 Method of manufacture of an integrated circuit system with self-aligned isolation structures Electricity 2 Active
US7923365B2 Methods of forming field effect transistors having stress-inducing sidewall insulating spacers thereon Electricity 2 Active
US7541288B2 Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques Electricity 1 Active
US7622403B2 Semiconductor processing system with ultra low-K dielectric Electricity 1 Active
US7459388B2 Methods of forming dual-damascene interconnect structures using adhesion layers having high internal compressive stresses Electricity 1 Active
US7906426B2 Method of controlled low-k via etch for Cu interconnections Electricity 0 Active
US7829422B2 Integrated circuit having ultralow-K dielectric layer Electricity 0 Active
US7767577B2 Nested and isolated transistors with reduced impedance difference Electricity 0 Active
US7999300B2 Memory cell structure and method for fabrication thereof Emerging Cross-Sectional Technologies 0 Active
US7737029B2 Methods of forming metal interconnect structures on semiconductor substrates using oxygen-removing plasmas and interconnect structures formed thereby Electricity 0 Active
US7932178B2 Integrated circuit having a plurality of MOSFET devices Electricity 0 Active
US8143651B2 Nested and isolated transistors with reduced impedance difference Electricity 0 Active
US7795680B2 Integrated circuit system employing selective epitaxial growth technology Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.