Patent · US Active

Reticle with composite polarizer and method of simultaneous optimization of imaging of a set of different patterns

US8883372B2 · kind B2 · utility

1Cited by

3References

18Claims

0Family size

Assignee

NANYA TECHNOLOGY CORPORATION · TW

Inventors

Scott L. Light · Boise, US
Dan B. Millward · Boise, US
Anton J. deVilliers · Boise, US
Yuan He · Boise, US
Michael Hyatt · Boise, US
Lijing Gou · Boise, US
Kaveri Jain · Boise, US
Zishu Zhang · Boise, US
Jianming Zhou · Suzhou, CN

Key dates

Filing date	Jun 5, 2012
Grant date	Nov 11, 2014
Priority date	—
Expiry date	Aug 18, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F1/50
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A reticle with a composite polarizer includes: a transparent substrate; a patterned layer disposed on said transparent substrate; and a polarizing filter disposed on said transparent substrate, wherein said transparent substrate is substantially transparent with respect to illumination light, said patterned layer is partially opaque with respect to said illumination light, and said polarizing filter is capable of selectively polarizing said illumination light.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.