Chamber sealing member

US9005539B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Michael Halpin · Scottsdale, US
• Eric James Shero · Phoenix, US
• Carl Louis White · Gilbert, US
• Fred Alokozai · Scottsdale, US
• Jerry Winkler · Gilbert, US
• Todd Robert Dunn · Cave Creek, US

Key dates

• Filing date: Nov 14, 2012
• Grant date: Apr 14, 2015
• Expiry date: Mar 17, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67126
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.