Patent · US Active

Optical beam deflecting element, illumination system including same, and related method

US9025131B2 · kind B2 · utility

0Cited by

4References

24Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Daniel Runde · Satteldorf, DE
Florian Doll · Puchheim, DE
Reinhard Voelkel · Neuchâtel, CH
Kenneth Weible · Moutier, CH
Gundula Weiss · Aalen, DE
Michael Gerhard · Aalen, DE

Key dates

Filing date	Jan 25, 2012
Grant date	May 5, 2015
Priority date	—
Expiry date	Dec 29, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70158
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.