Linked vacuum processing tools and methods of using the same

US9147592B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Eric A. Englhardt · Palo Alto, US
• Steve Szudarski · Fremont, US
• Andrew Scott Cornelius · San Jose, US
• Amitabh Puri · San Jose, US
• Michael R. Rice · Pleasanton, US
• Jeffrey C. Hudgens · San Francisco, US
• Steven V. Sansoni · Livermore, US
• Robert Irwin Decottignies · San Carlos, US
• Dean C. Hruzek · Cedar Park, US
• Peter Robert IRWIN · Gainesville, US
• Nir Merry · Mountain View, US

Key dates

• Filing date: Aug 7, 2013
• Grant date: Sep 29, 2015
• Expiry date: Dec 10, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67184
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.