Patent · US Active

System and method for inspecting a sample using landing lens

US9297692B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Yoram Uziel · Yodfat, IL
Alon Litman · Nes Ziona, IL
Ofer Adan · Rehovot, IL
Ron Naftali · Shoham, IL
Juergen Frosien · Ottobrunn, DE

Key dates

Filing date	Feb 20, 2013
Grant date	Mar 29, 2016
Priority date	—
Expiry date	Feb 8, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG02B13/001
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.