Chamber sealing member

US9340874B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Michael Halpin · Scottsdale, US
• Eric James Shero · Phoenix, US
• Carl Louis White · Gilbert, US
• Fred Alokozai · Scottsdale, US
• Jerry Winkler · Gilbert, US
• Todd Robert Dunn · Cave Creek, US

Key dates

• Filing date: Feb 27, 2015
• Grant date: May 17, 2016
• Expiry date: Feb 27, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67126
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.