Segmented bond pads and methods of fabrication thereof
US9543260B2 · kind B2 · utility
4Cited by
1References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 2013 |
| Grant date | Jan 10, 2017 |
| Priority date | — |
| Expiry date | Nov 17, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/181
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with an embodiment of the present invention, a semiconductor device includes a first bond pad disposed at a first side of a substrate. The first bond pad includes a first plurality of pad segments. At least one pad segment of the first plurality of pad segments is electrically isolated from the remaining pad segments of the first plurality of pad segments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.