Phase characterization of targets
US9581430B2 · kind B2 · utility
12Cited by
1References
12Claims
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Key dates
| Filing date | Oct 18, 2013 |
| Grant date | Feb 28, 2017 |
| Priority date | — |
| Expiry date | Dec 23, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods are provided which derive target characteristics from interferometry images taken at multiple phase differences between target beams and reference beams yielding the interferometry images. The illumination of the target and the reference has a coherence length of less than 30 microns to enable scanning the phase through the coherence length of the illumination. The interferometry images are taken at the pupil plane and/or in the field plane to combine angular and spectroscopic scatterometry data that characterize and correct target topography and enhance the performance of metrology systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.