Disk-brush cleaner module with fluid jet

US9646859B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Hui Chen · Burlingame, US
• Allen L. D'Ambra · Burlingame, US
• Sen-Hou Ko · Cupertino, US
• Yufei Chen · Gaozhou City, CN
• Adrian Blank · Gilroy, US
• Mario David Silvetti · Fountain Hills, US
• Gerald Alonzo · Los Gatos, US
• Lakshmanan Karuppiah · San Jose, US

Key dates

• Filing date: Apr 30, 2010
• Grant date: May 9, 2017
• Expiry date: May 18, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67051
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Embodiments of the present invention relates to an apparatus and method for cleaning a substrate using a disk brush. One embodiment provides a substrate cleaner comprising a substrate chuck disposed in the processing volume, and a brush assembly disposed in the processing volume, wherein the brush assembly comprises a disk brush movably disposed opposing the substrate chuck, and a processing surface of the disk brush contacts a surface of the substrate on the substrate chuck.