Mario David Silvetti
21Patents
6h-index
72Co-inventors
68Inventor score
Filing activity: Aug 20, 2003 → Feb 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7024105B2 | Substrate heater assembly | Electricity | 25 | Expired |
| US7582167B2 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Chemistry; Metallurgy | 14 | Active |
| US7695232B2 | Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Emerging Cross-Sectional Technologies | 13 | Active |
| US7107125B2 | Method and apparatus for monitoring the position of a semiconductor processing robot | Electricity | 13 | Expired |
| US7374393B2 | Method of retaining a substrate during a substrate transferring process | Electricity | 12 | Expired |
| US7374391B2 | Substrate gripper for a substrate handling robot | Electricity | 6 | Expired |
| US7997851B2 | Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Emerging Cross-Sectional Technologies | 3 | Active |
| US7279049B2 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Chemistry; Metallurgy | 3 | Expired |
| US11174553B2 | Gas distribution assembly for improved pump-purge and precursor delivery | Chemistry; Metallurgy | 3 | Active |
| US6911403B2 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Electricity | 3 | Expired |
| US9812344B2 | Wafer processing system with chuck assembly maintenance module | Performing Operations; Transporting | 1 | Active |
| US7094313B2 | Universal mid-frequency matching network | Electricity | 1 | Expired |
| US11081318B2 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Electricity | 1 | Active |
| US11396703B2 | Apparatus and methods for improving chemical utilization rate in deposition process | Electricity | 0 | Active |
| US11173579B2 | Inner retaining ring and outer retaining ring for carrier head | Performing Operations; Transporting | 0 | Active |
| US11581213B2 | Susceptor wafer chucks for bowed wafers | Electricity | 0 | Active |
| US11692267B2 | Plasma induced modification of silicon carbide surface | Electricity | 0 | Active |
| US9646859B2 | Disk-brush cleaner module with fluid jet | Electricity | 0 | Active |
| US11584992B2 | Gas distribution assembly for improved pump-purge and precursor delivery | Chemistry; Metallurgy | 0 | Active |
| US11282676B2 | Paired dynamic parallel plate capacitively coupled plasmas | Electricity | 0 | Active |
| US11923172B2 | Paired dynamic parallel plate capacitively coupled plasmas | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.