Inventor · Los Gatos, CA, US

Gerald Alonzo

9Patents
3h-index
25Co-inventors
57Inventor score

Filing activity: Dec 21, 1992 → Jun 1, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5266790A Focusing technique suitable for use with an unpatterned specular substrate Physics 13 Expired
US5402205A Alignment system for a Half-Field Dyson projection system Physics 10 Expired
US7963826B2 Apparatus and methods for conditioning a polishing pad Performing Operations; Transporting 6 Active
US5329332A System for achieving a parallel relationship between surfaces of wafer and reticle of half-field dyson stepper Physics 3 Expired
US7314808B2 Method for sequencing substrates Electricity 1 Expired
US9646859B2 Disk-brush cleaner module with fluid jet Electricity 0 Active
US11717936B2 Methods for a web-based CMP system Emerging Cross-Sectional Technologies 0 Active
US11764069B2 Asymmetry correction via variable relative velocity of a wafer Electricity 0 Active
US7407433B2 Pad characterization tool Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.