BEOL vertical fuse formed over air gap
US9666528B1 · kind B1 · utility
403Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2016 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Feb 23, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/7682
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.