Inventor · Rexford, NY, US

Christopher J. Waskiewicz

67Patents
8h-index
64Co-inventors
81Inventor score

Filing activity: Apr 30, 1996 → Jul 7, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9666528B1 BEOL vertical fuse formed over air gap Electricity 403 Active
US6294449A Self-aligned contact for closely spaced transistors Electricity 26 Expired
US10229986B1 Vertical transport field-effect transistor including dual layer top spacer Electricity 22 Active
US5712702A Method and apparatus for determining chamber cleaning end point Chemistry; Metallurgy 18 Expired
US9449871B1 Hybrid airgap structure with oxide liner Electricity 12 Active
US6703312B2 Method of forming active devices of different gatelengths using lithographic printed gate images of same length Electricity 12 Expired
US8986921B2 Lithographic material stack including a metal-compound hard mask Physics 9 Active
US9780027B2 Hybrid airgap structure with oxide liner Electricity 8 Active
US10319833B1 Vertical transport field-effect transistor including air-gap top spacer Electricity 8 Active
US10483361B1 Wrap-around-contact structure for top source/drain in vertical FETs Electricity 7 Active
US8987133B2 Titanium oxynitride hard mask for lithographic patterning Electricity 6 Active
US10361129B1 Self-aligned double patterning formed fincut Electricity 6 Active
US11171051B1 Contacts and liners having multi-segmented protective caps Electricity 4 Active
US5753303A Process for the elimination of tungsten oxidation with inert gas stabilization in chemical vapor deposition processes Electricity 4 Expired
US10559671B2 Vertical transport field-effect transistor including air-gap top spacer Electricity 4 Active
US10770653B1 Selective dielectric deposition to prevent gouging in MRAM Electricity 3 Active
US9087876B2 Titanium oxynitride hard mask for lithographic patterning Electricity 3 Active
US11239165B2 Method of forming an interconnect structure with enhanced corner connection Electricity 2 Active
US6303275A Method for resist filling and planarization of high aspect ratio features Physics 2 Expired
US9978560B2 System and method for performing nano beam diffraction analysis Electricity 2 Active
US10475878B2 BEOL capacitor through airgap metallization Electricity 1 Active
US11244861B2 Method and structure for forming fully-aligned via Electricity 1 Active
US10741652B2 Wrap-around-contact structure for top source/drain in vertical FETs Electricity 1 Active
US6489255B1 Low temperature/low dopant oxide glass film Electricity 1 Expired
US11476346B2 Vertical transistor having an oxygen-blocking top spacer Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.