Inventor · Troy, NY, US

Marc A. Bergendahl

115Patents
12h-index
76Co-inventors
89Inventor score

Filing activity: Mar 28, 2002 → Aug 7, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9666528B1 BEOL vertical fuse formed over air gap Electricity 403 Active
US9608065B1 Air gap spacer for metal gates Electricity 89 Active
US9620590B1 Nanosheet channel-to-source and drain isolation Electricity 86 Active
US9799765B1 Formation of a bottom source-drain for vertical field-effect transistors Electricity 25 Active
US8785284B1 FinFETs and fin isolation structures Electricity 24 Active
US9905643B1 Vertically aligned nanowire channels with source/drain interconnects for nanosheet transistors Electricity 22 Active
US8906807B2 Single fin cut employing angled processing methods Electricity 20 Active
US9177820B2 Sub-lithographic semiconductor structures with non-constant pitch Electricity 19 Active
US8492274B2 Metal alloy cap integration Electricity 18 Active
US8896067B2 Method of forming finFET of variable channel width Electricity 16 Active
US8941156B2 Self-aligned dielectric isolation for FinFET devices Electricity 13 Active
US9450095B1 Single spacer for complementary metal oxide semiconductor process flow Electricity 13 Active
US8003512B2 Structure of UBM and solder bumps and methods of fabrication Electricity 12 Active
US9449871B1 Hybrid airgap structure with oxide liner Electricity 12 Active
US10083961B2 Gate cut with integrated etch stop layer Electricity 11 Active
US9263290B2 Sub-lithographic semiconductor structures with non-constant pitch Electricity 8 Active
US9780027B2 Hybrid airgap structure with oxide liner Electricity 8 Active
US10014391B2 Vertical transport field effect transistor with precise gate length definition Electricity 8 Active
US10074730B2 Forming stacked nanowire semiconductor device Electricity 8 Active
US8629511B2 Mask free protection of work function material portions in wide replacement gate electrodes Electricity 7 Active
US10211055B2 Fin patterns with varying spacing without fin cut Electricity 7 Active
US9728622B1 Dummy gate formation using spacer pull down hardmask Electricity 7 Active
US8716127B2 Metal alloy cap integration Electricity 5 Active
US10381437B2 Semiconductor device and method of forming the semiconductor device Electricity 4 Active
US10043801B2 Air gap spacer for metal gates Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.