Inventor · Saratoga Springs, NY, US

Christopher J. Penny

165Patents
12h-index
86Co-inventors
85Inventor score

Filing activity: Feb 9, 2007 → Apr 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9305836B1 Air gap semiconductor structure with selective cap bilayer Electricity 463 Active
US9666528B1 BEOL vertical fuse formed over air gap Electricity 403 Active
US10229851B2 Self-forming barrier for use in air gap formation Electricity 296 Active
US9837355B2 Method for maximizing air gap in back end of the line interconnect through via landing modification Electricity 294 Active
US9349687B1 Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect Electricity 74 Active
US9911651B1 Skip-vias bypassing a metallization level at minimum pitch Electricity 16 Active
US9553019B1 Airgap protection layer for via alignment Electricity 15 Active
US9991156B2 Self-aligned quadruple patterning (SAQP) for routing layouts including multi-track jogs Electricity 14 Active
US9786760B1 Air gap and air spacer pinch off Electricity 13 Active
US9966337B1 Fully aligned via with integrated air gaps Electricity 13 Active
US9934970B1 Self aligned pattern formation post spacer etchback in tight pitch configurations Electricity 12 Active
US9449871B1 Hybrid airgap structure with oxide liner Electricity 12 Active
US8835305B2 Method of fabricating a profile control in interconnect structures Electricity 10 Active
US9779944B1 Method and structure for cut material selection Electricity 8 Active
US9685366B1 Forming chamferless vias using thermally decomposable porefiller Electricity 8 Active
US9780027B2 Hybrid airgap structure with oxide liner Electricity 8 Active
US7544609B2 Method for integrating liner formation in back end of line processing Electricity 6 Active
US9607886B1 Self aligned conductive lines with relaxed overlay Electricity 6 Active
US9711455B2 Method of forming an air gap semiconductor structure with selective cap bilayer Electricity 5 Active
US9793193B1 Air gap and air spacer pinch off Electricity 5 Active
US9793206B1 Heterogeneous metallization using solid diffusion removal of metal interconnects Electricity 5 Active
US10109579B2 Semiconductor device including a porous dielectric layer, and method of forming the semiconductor device Electricity 5 Active
US10529569B2 Self aligned pattern formation post spacer etchback in tight pitch configurations Electricity 4 Active
US10242933B2 Air gap and air spacer pinch off Electricity 4 Active
US9837305B1 Forming deep airgaps without flop over Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.