Scanning electron microscope and methods of inspecting and reviewing samples

US9767986B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• David L. Brown · Sunnyvale, US
• Yung-Ho Alex Chuang · Cupertino, US
• John Fielden · Los Altos, US
• Marcel Trimpl · San Jose, US
• Jingjing Zhang · Beijing, CN
• Devis Contarato · Redwood City, US
• Venkatraman Iyer · Sunnyvale, US

Key dates

• Filing date: Aug 25, 2015
• Grant date: Sep 19, 2017
• Expiry date: Dec 11, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/24592
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A scanning electron microscope incorporates a multi-pixel solid-state electron detector. The multi-pixel solid-state detector may detect back-scattered and/or secondary electrons. The multi-pixel solid-state detector may incorporate analog-to-digital converters and other circuits. The multi-pixel solid state detector may be capable of approximately determining the energy of incident electrons and/or may contain circuits for processing or analyzing the electron signals. The multi-pixel solid state detector is suitable for high-speed operation such as at a speed of about 100 MHz or higher. The scanning electron microscope may be used for reviewing, inspecting or measuring a sample such as unpatterned semiconductor wafer, a patterned semiconductor wafer, a reticle or a photomask. A method of reviewing or inspecting a sample is also described.