System and method for performing nano beam diffraction analysis
US9978560B2 · kind B2 · utility
2Cited by
5References
25Claims
0Family size
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Key dates
| Filing date | Jun 30, 2016 |
| Grant date | May 22, 2018 |
| Priority date | — |
| Expiry date | Nov 17, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for performing nano beam diffraction (NBD) analysis, includes a focused ion beam (FIB) device for preparing a transmission electron microscopy (TEM) sample, a broad beam ion mill for milling the TEM sample to remove a surface portion of the TEM sample, and a strain analyzer for performing NBD analysis on the milled TEM sample to acquire diffraction data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.