Lower shield for a substrate processing chamber
USD931241S1 · kind S1 · design
3Cited by
16References
1Claims
0Family size
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Key dates
| Filing date | Aug 28, 2019 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Sep 21, 2036 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.