Lower shield for a substrate processing chamber
USD971167S1 · kind S1 · design
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31References
1Claims
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Key dates
| Filing date | Apr 10, 2021 |
| Grant date | Nov 29, 2022 |
| Priority date | — |
| Expiry date | Nov 29, 2037 |
Classification
- Technology area (CPC —)General
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.