Anicon, Inc.
11Patents
0Active
11Granted
29Portfolio score
Filing activity: Aug 27, 1982 → Sep 4, 1987
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4694778A | Chemical vapor deposition wafer boat | Chemistry; Metallurgy | 135 | Expired |
| US4545327A | Chemical vapor deposition apparatus | Emerging Cross-Sectional Technologies | 69 | Expired |
| US4720395A | Low temperature silicon nitride CVD process | Chemistry; Metallurgy | 65 | Expired |
| US4817557A | Process and apparatus for low pressure chemical vapor deposition of refractory metal | Electricity | 39 | Expired |
| US4539933A | Chemical vapor deposition apparatus | Emerging Cross-Sectional Technologies | 31 | Expired |
| US4728869A | Pulsewidth modulated pressure control system for chemical vapor deposition apparatus | Emerging Cross-Sectional Technologies | 13 | Expired |
| US4524719A | Substrate loading means for a chemical vapor deposition apparatus | Emerging Cross-Sectional Technologies | 10 | Expired |
| US4547404A | Chemical vapor deposition process | Chemistry; Metallurgy | 5 | Expired |
| US4548159A | Chemical vapor deposition wafer boat | Chemistry; Metallurgy | 3 | Expired |
| US4582020A | Chemical vapor deposition wafer boat | Chemistry; Metallurgy | 3 | Expired |
| US4641604A | Chemical vapor deposition wafer boat | Chemistry; Metallurgy | 0 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.