Patent assignee · US · COMPANY

Blue29 LLC

11Patents
0Active
11Granted
31Portfolio score

Filing activity: Mar 22, 2002 → Jun 16, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US6881437B2 Methods and system for processing a microelectronic topography Emerging Cross-Sectional Technologies 74 Expired
US6913651B2 Apparatus and method for electroless deposition of materials on semiconductor substrates Electricity 35 Expired
US6902605B2 Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper Electricity 29 Expired
US6794288B1 Method for electroless deposition of phosphorus-containing metal films onto copper with palladium-free activation Electricity 28 Expired
US6860944B2 Microelectronic fabrication system components and method for processing a wafer using such components Electricity 25 Expired
US7235483B2 Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth Electricity 15 Expired
US6908512B2 Temperature-controlled substrate holder for processing in fluids Electricity 15 Expired
US6911067B2 Solution composition and method for electroless deposition of coatings free of alkali metals Chemistry; Metallurgy 14 Expired
US6935638B2 Universal substrate holder for treating objects in fluids Emerging Cross-Sectional Technologies 9 Expired
US6846519B2 Method and apparatus for electroless deposition with temperature-controlled chuck Chemistry; Metallurgy 7 Expired
US6939403B2 Spatially-arranged chemical processing station Electricity 6 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.