Blue29 LLC
11Patents
0Active
11Granted
31Portfolio score
Filing activity: Mar 22, 2002 → Jun 16, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6881437B2 | Methods and system for processing a microelectronic topography | Emerging Cross-Sectional Technologies | 74 | Expired |
| US6913651B2 | Apparatus and method for electroless deposition of materials on semiconductor substrates | Electricity | 35 | Expired |
| US6902605B2 | Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper | Electricity | 29 | Expired |
| US6794288B1 | Method for electroless deposition of phosphorus-containing metal films onto copper with palladium-free activation | Electricity | 28 | Expired |
| US6860944B2 | Microelectronic fabrication system components and method for processing a wafer using such components | Electricity | 25 | Expired |
| US7235483B2 | Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth | Electricity | 15 | Expired |
| US6908512B2 | Temperature-controlled substrate holder for processing in fluids | Electricity | 15 | Expired |
| US6911067B2 | Solution composition and method for electroless deposition of coatings free of alkali metals | Chemistry; Metallurgy | 14 | Expired |
| US6935638B2 | Universal substrate holder for treating objects in fluids | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6846519B2 | Method and apparatus for electroless deposition with temperature-controlled chuck | Chemistry; Metallurgy | 7 | Expired |
| US6939403B2 | Spatially-arranged chemical processing station | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.