Patent assignee · US · COMPANY

Inopla Inc.

5Patents
1Active
5Granted
29Portfolio score

Filing activity: Jan 27, 2004 → Feb 28, 2007 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7364496B2 Polishing head for polishing semiconductor wafers Performing Operations; Transporting 7 Active
US7223153B2 Apparatus and method for polishing semiconductor wafers using one or more polishing surfaces Performing Operations; Transporting 2 Expired
US7374471B2 Apparatus and method for polishing semiconductor wafers using one or more pivotable load-and-unload cups Electricity 1 Expired
US7367866B2 Apparatus and method for polishing semiconductor wafers using pivotable load/unload cups Performing Operations; Transporting 1 Expired
US7238614B2 Methods for fabricating one or more metal damascene structures in a semiconductor wafer Electricity 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.