Westech Systems, Inc.
6Patents
0Active
6Granted
29Portfolio score
Filing activity: Jun 26, 1974 → Dec 20, 1993
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5257478A | Apparatus for interlayer planarization of semiconductor material | Performing Operations; Transporting | 212 | Expired |
| US5456627A | Conditioner for a polishing pad and method therefor | Performing Operations; Transporting | 166 | Expired |
| US5144711A | Cleaning brush for semiconductor wafer | Performing Operations; Transporting | 64 | Expired |
| US4944119A | Apparatus for transporting wafer to and from polishing head | Performing Operations; Transporting | 59 | Expired |
| US5095661A | Apparatus for transporting wafer to and from polishing head | Performing Operations; Transporting | 51 | Expired |
| US3939571A | Method and apparatus for aiming aircraft visual approach slope indicator | Performing Operations; Transporting | 6 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.