Akihito Toda
6Patents
5h-index
7Co-inventors
52Inventor score
Filing activity: Jun 12, 1991 → Mar 12, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5147493A | Plasma generating apparatus | Electricity | 66 | Expired |
| US5385624A | Apparatus and method for treating substrates | Electricity | 29 | Expired |
| US5858878A | Semiconductor wafer etching method and post-etching process | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7297635B2 | Processing method | Electricity | 14 | Expired |
| US6299722A | Etching equipment including a post processing apparatus for removing a resist film, polymer, and impurity layer from an object | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8058585B2 | Plasma processing method, plasma processing apparatus and storage medium | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.