Alex Buxbaum
11Patents
3h-index
13Co-inventors
57Inventor score
Filing activity: Mar 16, 2001 → Apr 26, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6582861B2 | Method of reshaping a patterned organic photoresist surface | Physics | 29 | Expired |
| US6703169B2 | Method of preparing optically imaged high performance photomasks | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6931619B2 | Apparatus for reshaping a patterned organic photoresist surface | Physics | 4 | Expired |
| US7244334B2 | Apparatus used in reshaping a surface of a photoresist | Physics | 2 | Expired |
| US6998206B2 | Method of increasing the shelf life of a blank photomask substrate | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7077973B2 | Methods for substrate orientation | Electricity | 2 | Expired |
| US7208249B2 | Method of producing a patterned photoresist used to prepare high performance photomasks | Physics | 1 | Expired |
| US12288706B2 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Physics | 0 | Active |
| US11848172B2 | Method for measuring a sample and microscope implementing the method | Electricity | 0 | Active |
| US12283504B2 | Contact area size determination between 3D structures in an integrated semiconductor sample | Physics | 0 | Active |
| US12288705B2 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.