Inventor · Santa Clara, CA, US

Alexander Kabansky

7Patents
4h-index
17Co-inventors
46Inventor score

Filing activity: Apr 24, 2015 → Feb 11, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9576811B2 Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Electricity 59 Active
US9805941B2 Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Electricity 41 Active
US10186426B2 Integrating atomic scale processes: ALD (atomic layer deposition) and ale (atomic layer etch) Electricity 14 Active
US10515816B2 Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) Electricity 6 Active
US10825680B2 Directional deposition on patterned structures Electricity 3 Active
US11521860B2 Selectively etching for nanowires Electricity 0 Active
US12027375B2 Selective etch using a sacrificial mask Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.