Anand KUMAR
7Patents
2h-index
21Co-inventors
51Inventor score
Filing activity: Nov 6, 1998 → May 16, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6055150A | Multi-electrode electrostatic chuck having fuses in hollow cavities | Emerging Cross-Sectional Technologies | 72 | Expired |
| US9761416B2 | Apparatus and methods for reducing particles in semiconductor process chambers | Emerging Cross-Sectional Technologies | 3 | Active |
| US12002703B2 | Lift pin assembly | Electricity | 0 | Active |
| US10770269B2 | Apparatus and methods for reducing particles in semiconductor process chambers | Emerging Cross-Sectional Technologies | 0 | Active |
| US11004722B2 | Lift pin assembly | Electricity | 0 | Active |
| US10695427B2 | Shape memory particles for biomedical uses | Performing Operations; Transporting | 0 | Active |
| US12412769B2 | Electrostatic chucks with hybrid pucks to improve thermal performance and leakage current stability | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.