Inventor · Palo Alto, CA, US

Anqing Cui

11Patents
4h-index
29Co-inventors
60Inventor score

Filing activity: Sep 19, 2002 → Jul 20, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6617553B2 Multi-zone resistive heater Electricity 38 Expired
US9312154B2 CVD apparatus for improved film thickness non-uniformity and particle performance Electricity 14 Active
US8618446B2 Substrate support with substrate heater and symmetric RF return Electricity 11 Active
US10407771B2 Atomic layer deposition chamber with thermal lid Electricity 7 Active
US11715667B2 Thermal process chamber lid with backside pumping Electricity 2 Active
US9892941B2 Multi-zone resistive heater Electricity 1 Active
US11335591B2 Thermal process chamber lid with backside pumping Electricity 1 Active
US9202674B2 Plasma reactor with a ceiling electrode supply conduit having a succession of voltage drop elements Electricity 0 Active
US11767590B2 ALD cycle time reduction using process chamber lid with tunable pumping Chemistry; Metallurgy 0 Active
US12054826B2 ALD cycle time reduction using process chamber lid with tunable pumping Chemistry; Metallurgy 0 Active
US12387975B2 Thermal process chamber lid with backside pumping Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.