Boris Grek
20Patents
8h-index
24Co-inventors
71Inventor score
Filing activity: Jun 22, 1998 → Apr 15, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6097488A | Method and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered light | Physics | 57 | Expired |
| US6507405B1 | Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt | Physics | 50 | Expired |
| US7148159B2 | Laser thermal annealing of lightly doped silicon substrates | Performing Operations; Transporting | 19 | Expired |
| US7744274B1 | Methods and apparatus for temperature measurement and control on a remote substrate surface | Physics | 17 | Active |
| US7514305B1 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Electricity | 16 | Active |
| US6347176B1 | Acousto-optical light tunnel apparatus and method | Physics | 13 | Expired |
| US7440655B2 | Duplex arrayed waveguide grating | Physics | 9 | Expired |
| US7879741B2 | Laser thermal annealing of lightly doped silicon substrates | Performing Operations; Transporting | 8 | Active |
| US7176405B2 | Heat shield for thermal processing | Performing Operations; Transporting | 5 | Expired |
| US7403284B2 | Integrated optics based high-resolution spectrophotometer | Physics | 5 | Expired |
| US7238915B2 | Methods and apparatus for irradiating a substrate to avoid substrate edge damage | Performing Operations; Transporting | 5 | Expired |
| US7639908B2 | Broadcasting arrayed waveguide | Electricity | 5 | Active |
| US7840104B2 | Ultra-wide band AWG multiplexer | Physics | 4 | Active |
| US8153930B1 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Electricity | 4 | Active |
| US7292616B2 | CO2 laser stabilization systems and methods | Electricity | 2 | Expired |
| US8742286B1 | Apparatus and method for improving the intensity profile of a beam image used to process a substrate | Electricity | 2 | Active |
| US8746975B2 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Physics | 1 | Active |
| US8314360B2 | Apparatuses and methods for irradiating a substrate to avoid substrate edge damage | Performing Operations; Transporting | 0 | Active |
| US8731139B2 | Evaporative thermal management of grazing incidence collectors for EUV lithography | Electricity | 0 | Active |
| US9401278B2 | Apparatus and methods for improving the intensity profile of a beam image used to process a substrate | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.