Inventor · Eagle, ID, US

Brian J. Coppa

15Patents

6h-index

22Co-inventors

62Inventor score

Filing activity: Jul 10, 2006 → Apr 27, 2022

Most-cited inventions

Patent	Title	Area	Cited by	Status
US10773282B2	Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy	Electricity	37	Active
US10446453B2	Surface modification control for etch metric enhancement	Physics	37	Active
US10304668B2	Localized process control using a plasma system	Electricity	36	Active
US8852851B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	18	Active
US10333047B2	Electrical, mechanical, computing/ and/or other devices formed of extremely low resistance materials	Emerging Cross-Sectional Technologies	15	Active
US8129289B2	Method to deposit conformal low temperature SiO2	Electricity	9	Active
US11289639B2	Electrical, mechanical, computing, and/or other devices formed of extremely low resistance materials	Emerging Cross-Sectional Technologies	6	Active
US9761457B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	5	Active
US10096483B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	4	Active
US10607844B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	2	Active
US9305782B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	1	Active
US11335563B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	0	Active
US11935756B2	Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same	Electricity	0	Active
US11273469B2	Controlling dry etch process characteristics using waferless dry clean optical emission spectroscopy	Electricity	0	Active
US12063874B2	Electrical, mechanical, computing, and/or other devices formed of extremely low resistance materials	Emerging Cross-Sectional Technologies	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.