Inventor · Concord, MA, US

Bruce Wachtmann

6Patents
3h-index
8Co-inventors
39Inventor score

Filing activity: Jan 11, 2002 → Apr 19, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6936918B2 MEMS device with conductive path through substrate Electricity 62 Expired
US7034393B2 Semiconductor assembly with conductive rim and method of producing the same Emerging Cross-Sectional Technologies 31 Expired
US6964894B2 Apparatus and method of forming a device layer Performing Operations; Transporting 8 Expired
US7906359B2 Method of forming a surface micromachined MEMS device Physics 2 Active
US6956274B2 TiW platinum interconnect and method of making the same Performing Operations; Transporting 0 Expired
US6878626B1 TiW platinum interconnect and method of making the same Performing Operations; Transporting 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.