Inventor · Kluang, MY

Chun Hui Low

11Patents
6h-index
24Co-inventors
62Inventor score

Filing activity: Apr 12, 1999 → Jun 17, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US6228727A Method to form shallow trench isolations with rounded corners and reduced trench oxide recess Electricity 102 Expired
US6265302A Partially recessed shallow trench isolation method for fabricating borderless contacts Electricity 42 Expired
US6350661B2 Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts Electricity 24 Expired
US6271133A Optimized Co/Ti-salicide scheme for shallow junction deep sub-micron device fabrication Emerging Cross-Sectional Technologies 17 Expired
US6297126A Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts Electricity 13 Expired
US7045455B2 Via electromigration improvement by changing the via bottom geometric profile Electricity 7 Expired
US7352064B2 Multiple layer resist scheme implementing etch recipe particular to each layer Electricity 4 Expired
US8354347B2 Method of forming high-k dielectric stop layer for contact hole opening Electricity 4 Active
US8293545B2 Critical dimension for trench and vias Electricity 1 Active
US7781895B2 Via electromigration improvement by changing the via bottom geometric profile Electricity 0 Active
US7691739B2 Via electromigration improvement by changing the via bottom geometric profile Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.