Da He
6Patents
1h-index
16Co-inventors
44Inventor score
Filing activity: Jul 13, 2009 → Aug 1, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11404313B2 | Selective tungsten deposition at low temperatures | Electricity | 1 | Active |
| US12406884B2 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Electricity | 0 | Active |
| US11967525B2 | Selective tungsten deposition at low temperatures | Electricity | 0 | Active |
| US8578372B2 | Business-in-a-box integration server and integration method | Physics | 0 | Active |
| US12191200B2 | Methods for minimizing feature-to-feature gap fill height variations | Electricity | 0 | Active |
| US11955381B2 | Low-temperature plasma pre-clean for selective gap fill | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.