Dai Ueda
11Patents
4h-index
16Co-inventors
53Inventor score
Filing activity: May 28, 2003 → Nov 16, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7016186B2 | Portable information processing apparatus | Physics | 24 | Expired |
| US10153181B2 | Substrate treating apparatus and substrate treating method | Chemistry; Metallurgy | 8 | Active |
| US10792712B2 | Substrate processing method and substrate processing apparatus | Electricity | 5 | Active |
| US7245665B2 | Wireless remote operation system | Electricity | 4 | Expired |
| US11211241B2 | Substrate processing method and substrate processing apparatus | Electricity | 3 | Active |
| US11133175B2 | Substrate treating method and substrate treating apparatus | Electricity | 1 | Active |
| US11908938B2 | Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US10619894B2 | Substrate processing apparatus and substrate processing method | Performing Operations; Transporting | 0 | Active |
| US11897009B2 | Substrate processing method and substrate processing device | Electricity | 0 | Active |
| US11260431B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US11901173B2 | Substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.