Inventor · Fremont, CA, US

Dan Zhang

10Patents
2h-index
30Co-inventors
50Inventor score

Filing activity: Dec 12, 2006 → Apr 19, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7752150B2 Dynamic economic load dispatch by applying dynamic programming to a genetic algorithm Emerging Cross-Sectional Technologies 6 Active
US11694911B2 Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead Electricity 4 Active
US10700688B1 Low power and low jitter phase locked loop with digital leakage compensation Physics 2 Active
US9307305B2 Smart ODN system of low power consumption Electricity 0 Active
US12347650B2 Substrate processing system including dual ion filter for downstream plasma Electricity 0 Active
US11193909B2 Low power photoionization detector (PID) Electricity 0 Active
US12272571B2 Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead Electricity 0 Active
US12211709B2 Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead Electricity 0 Active
US12272570B2 Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead Electricity 0 Active
US11967486B2 Substrate processing system including dual ion filter for downstream plasma Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.