Daniel Towery
7Patents
5h-index
8Co-inventors
48Inventor score
Filing activity: Feb 13, 1998 → Jun 7, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6152148A | Method for cleaning semiconductor wafers containing dielectric films | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6270395A | Oxidizing polishing slurries for low dielectric constant materials | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6407006B1 | Method for integrated circuit planarization | Physics | 29 | Expired |
| US6153525A | Methods for chemical mechanical polish of organic polymer dielectric films | Electricity | 25 | Expired |
| US6630433B2 | Composition for chemical mechanical planarization of copper, tantalum and tantalum nitride | Electricity | 21 | Expired |
| US6821190B1 | Static pad conditioner | Performing Operations; Transporting | 1 | Expired |
| US7175515B2 | Static pad conditioner | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.