Daniel Walldorf
7Patents
2h-index
23Co-inventors
43Inventor score
Filing activity: Mar 4, 2010 → Sep 13, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8873023B2 | Illumination system for microlithography | Physics | 4 | Active |
| US9280060B2 | Illumination system for microlithography | Physics | 3 | Active |
| US9606441B2 | Illumination system for microlithography | Physics | 1 | Active |
| US10151982B2 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Physics | 1 | Active |
| US10088754B2 | Illumination system for microlithography | Physics | 0 | Active |
| US9316920B2 | Illumination system of a microlithographic projection exposure apparatus with a birefringent element | Physics | 0 | Active |
| US10403995B2 | Electrical connector, electronic component, and assembly method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.