Danny Lu
10Patents
6h-index
18Co-inventors
59Inventor score
Filing activity: Dec 8, 1995 → Oct 3, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5756400A | Method and apparatus for cleaning by-products from plasma chamber surfaces | Emerging Cross-Sectional Technologies | 318 | Expired |
| US6352081B1 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Emerging Cross-Sectional Technologies | 217 | Expired |
| US6123791A | Ceramic composition for an apparatus and method for processing a substrate | Emerging Cross-Sectional Technologies | 66 | Expired |
| US6641697B2 | Substrate processing using a member comprising an oxide of a group IIIB metal | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6352611B1 | Ceramic composition for an apparatus and method for processing a substrate | Emerging Cross-Sectional Technologies | 39 | Expired |
| US7371467B2 | Process chamber component having electroplated yttrium containing coating | Emerging Cross-Sectional Technologies | 27 | Expired |
| US7833401B2 | Electroplating an yttrium-containing coating on a chamber component | Emerging Cross-Sectional Technologies | 5 | Active |
| US6413389B1 | Method for recovering metal from etch by-products | Emerging Cross-Sectional Technologies | 3 | Expired |
| US10217627B2 | Methods of non-destructive post tungsten etch residue removal | Performing Operations; Transporting | 1 | Active |
| US8114525B2 | Process chamber component having electroplated yttrium containing coating | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.