Deepak Jadhav
8Patents
2h-index
16Co-inventors
40Inventor score
Filing activity: Jan 27, 2015 → Oct 18, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11384432B2 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Electricity | 2 | Active |
| US9879341B2 | Method and apparatus for microwave assisted chalcogen radicals generation for 2-D materials | Chemistry; Metallurgy | 2 | Active |
| US11043364B2 | Process kit for multi-cathode processing chamber | Electricity | 1 | Active |
| US10651095B2 | Thermal profile monitoring wafer and methods of monitoring temperature | Electricity | 1 | Active |
| US11932939B2 | Lids and lid assembly kits for atomic layer deposition chambers | Electricity | 0 | Active |
| US11515218B2 | Thermal profile monitoring wafer and methods of monitoring temperature | Electricity | 0 | Active |
| US11183375B2 | Deposition system with multi-cathode and method of manufacture thereof | Electricity | 0 | Active |
| US11600476B2 | Deposition system with multi-cathode and method of manufacture thereof | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.