Dong Il Chun
6Patents
4h-index
7Co-inventors
39Inventor score
Filing activity: Nov 22, 1995 → May 27, 1999
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6054331A | Apparatus and methods of depositing a platinum film with anti-oxidizing function over a substrate | Electricity | 62 | Expired |
| US6025205A | Apparatus and methods of forming preferred orientation-controlled platinum films using nitrogen | Electricity | 23 | Expired |
| US5736422A | Method for depositing a platinum layer on a silicon wafer | Electricity | 23 | Expired |
| US6498097B1 | Apparatus and method of forming preferred orientation-controlled platinum film using oxygen | Electricity | 19 | Expired |
| US5981390A | Method for depositing a platinum layer on a silicon wafer | Electricity | 3 | Expired |
| US6312567A | Method of forming a (200)-oriented platinum layer | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.