Fred Sun
6Patents
2h-index
10Co-inventors
44Inventor score
Filing activity: Jul 19, 2002 → Jan 12, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7044836B2 | Coated metal oxide particles for CMP | Electricity | 35 | Expired |
| US6811474B2 | Polishing composition containing conducting polymer | Electricity | 10 | Expired |
| US7021993B2 | Method of polishing a substrate with a polishing system containing conducting polymer | Electricity | 2 | Expired |
| US7255810B2 | Polishing system comprising a highly branched polymer | Chemistry; Metallurgy | 1 | Expired |
| US10100272B2 | Cleaning composition following CMP and methods related thereto | Chemistry; Metallurgy | 0 | Active |
| US9828574B2 | Cleaning composition and method for cleaning semiconductor wafers after CMP | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.