Fumihiko Uchida
16Patents
12h-index
27Co-inventors
78Inventor score
Filing activity: Feb 5, 1981 → May 28, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5820679A | Fabrication system and method having inter-apparatus transporter | Emerging Cross-Sectional Technologies | 93 | Expired |
| US5981399A | Method and apparatus for fabricating semiconductor devices | Electricity | 67 | Expired |
| US6099598A | Fabrication system and fabrication method | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5562800A | Wafer transport method | Emerging Cross-Sectional Technologies | 50 | Expired |
| US5416331A | Surface atom fabrication method and apparatus | Emerging Cross-Sectional Technologies | 46 | Expired |
| US5628828A | Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface | Emerging Cross-Sectional Technologies | 44 | Expired |
| US5858863A | Fabrication system and method having inter-apparatus transporter | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5411430A | Scanning optical device and method for making a hybrid scanning lens used therefor | Physics | 18 | Expired |
| US5601686A | Wafer transport method | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7062344B2 | Fabrication system and fabrication method | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5689494A | Surface atom fabrication method and apparatus | Emerging Cross-Sectional Technologies | 14 | Expired |
| US4380917A | Tube-bending machine | Performing Operations; Transporting | 13 | Expired |
| US4739161A | Fine displacement transducer employing plural optical fibers | Physics | 9 | Expired |
| US7603194B2 | Fabrication system and fabrication method | Emerging Cross-Sectional Technologies | 4 | Active |
| US7392106B2 | Fabrication system and fabrication method | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7310563B2 | Fabrication system and fabrication method | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.