Inventor · Leicester, MA, US

Gerald B. Wayton

11Patents
4h-index
13Co-inventors
53Inventor score

Filing activity: Sep 26, 2002 → Aug 29, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7585612B2 Coating compositions for use with an overcoated photoresist Physics 39 Active
US7919222B2 Coating compositions for use with an overcoated photoresist Physics 36 Active
US6852421B2 Coating compositions for use with an overcoated photoresist Emerging Cross-Sectional Technologies 28 Expired
US7163751B2 Coating compositions for use with an overcoated photoresist Emerging Cross-Sectional Technologies 12 Expired
US7781141B2 Compositions and processes for immersion lithography Physics 4 Expired
US7582360B2 Coating compositions for use with an overcoated photoresist Emerging Cross-Sectional Technologies 4 Active
US8911927B2 Compositions and processes for immersion lithography Physics 2 Active
US9244352B2 Coating compositions for use with an overcoated photoresist Electricity 2 Active
US8927681B2 Coating composition for use with an overcoated photoresist Emerging Cross-Sectional Technologies 1 Active
US9429844B2 Coating compositions for use with an overcoated photoresist Physics 0 Active
US10261418B2 Coating compositions for use with an overcoated photoresist Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.