Gon-jun Kim
6Patents
2h-index
23Co-inventors
43Inventor score
Filing activity: Jun 5, 2014 → Jun 21, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9966274B2 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Electricity | 3 | Active |
| US9105581B2 | Method of processing a substrate and apparatus for performing the same | Electricity | 2 | Active |
| US11569065B2 | Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device | Electricity | 1 | Active |
| US9685346B2 | Method of generating plasma in remote plasma source and method of fabricating semiconductor device using the same method | Electricity | 1 | Active |
| US9865474B2 | Etching method using plasma, and method of fabricating semiconductor device including the etching method | Electricity | 0 | Active |
| US10418250B2 | Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.