Inventor · Chandler, AZ, US

Gregory Bartlett

9Patents
7h-index
28Co-inventors
59Inventor score

Filing activity: Feb 11, 2005 → Aug 6, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US9169975B2 Systems and methods for mass flow controller verification Emerging Cross-Sectional Technologies 487 Active
US9892913B2 Radial and thickness control via biased multi-port injection settings Electricity 448 Active
US10262859B2 Process for forming a film on a substrate using multi-port injection assemblies Electricity 396 Active
US7648579B2 Substrate support system for reduced autodoping and backside deposition Electricity 30 Expired
US8728239B2 Methods and apparatus for a gas panel with constant gas flow Emerging Cross-Sectional Technologies 13 Active
US8088225B2 Substrate support system for reduced autodoping and backside deposition Electricity 13 Active
US8047706B2 Calibration of temperature control system for semiconductor processing chamber Physics 12 Active
US11053591B2 Multi-port gas injection system and reactor system including same Electricity 2 Active
US8834955B2 Methods and apparatus for a gas panel with constant gas flow Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.