Gregory Bartlett
9Patents
7h-index
28Co-inventors
59Inventor score
Filing activity: Feb 11, 2005 → Aug 6, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9169975B2 | Systems and methods for mass flow controller verification | Emerging Cross-Sectional Technologies | 487 | Active |
| US9892913B2 | Radial and thickness control via biased multi-port injection settings | Electricity | 448 | Active |
| US10262859B2 | Process for forming a film on a substrate using multi-port injection assemblies | Electricity | 396 | Active |
| US7648579B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 30 | Expired |
| US8728239B2 | Methods and apparatus for a gas panel with constant gas flow | Emerging Cross-Sectional Technologies | 13 | Active |
| US8088225B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 13 | Active |
| US8047706B2 | Calibration of temperature control system for semiconductor processing chamber | Physics | 12 | Active |
| US11053591B2 | Multi-port gas injection system and reactor system including same | Electricity | 2 | Active |
| US8834955B2 | Methods and apparatus for a gas panel with constant gas flow | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.